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Nghiên cứu chế tạo một số vi cơ cấu (mô tơ, bánh răng siêu nhỏ) sử dụng trong các hệ thống Micro Robot phục vụ trong lĩnh vực Y sinh dựa trên công nghệ MEMS

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Tài liệu tham khảo Loại Chi tiết
[1] E I Garcia and J J Sniegowski, “Surface Micromachined Microengine as the Driver for Micromechanical Gears”, Transducers’95, Stockholm, Sweden (1995), pp 365-368 Sách, tạp chí
Tiêu đề: Surface Micromachined Microengine as the Driver for Micromechanical Gears
Tác giả: E I Garcia and J J Sniegowski, “Surface Micromachined Microengine as the Driver for Micromechanical Gears”, Transducers’95, Stockholm, Sweden
Năm: 1995
[2] J J Sniegowski and E I Garcia, “Surface-Micromachined Gear Trains Driven by an On-Chip Electrostatic Microengine”, IEEE Electron Device Letters, Vol. 17, No. 7, (1996), pp 366-368 Sách, tạp chí
Tiêu đề: Surface-Micromachined Gear Trains Driven by an On-Chip Electrostatic Microengine
Tác giả: J J Sniegowski and E I Garcia, “Surface-Micromachined Gear Trains Driven by an On-Chip Electrostatic Microengine”, IEEE Electron Device Letters, Vol. 17, No. 7
Năm: 1996
[3] S -C Kim and S H Kim, “Precise Rotary Motor by Inchworm Motion Using Dual Wrap Belt”, Review of Scientific and Instrument, Vol. 70, No. 5, (1999), pp 2546-2550 Sách, tạp chí
Tiêu đề: Precise Rotary Motor by Inchworm Motion Using Dual Wrap Belt
Tác giả: S -C Kim and S H Kim, “Precise Rotary Motor by Inchworm Motion Using Dual Wrap Belt”, Review of Scientific and Instrument, Vol. 70, No. 5
Năm: 1999
[4] Danelle M. Tanner et al, “Reliability of a MEMS Torsional Ratcheting Actuator”, IEEE - 39th Annual International Reliability Physics Symposium, Orlando, Florida (2001), pp. 81-90 Sách, tạp chí
Tiêu đề: Reliability of a MEMS Torsional Ratcheting Actuator
Tác giả: Danelle M. Tanner et al, “Reliability of a MEMS Torsional Ratcheting Actuator”, IEEE - 39th Annual International Reliability Physics Symposium, Orlando, Florida
Năm: 2001
[5] E Sacks and S M Barnes, “Computer-Aided Kinematic Design of a Torsional Ratcheting Actuator”, Proc. of the Fourth International Conference on Modeling and Simulation of Microsystems, Hilton Head, SC, (2001) Sách, tạp chí
Tiêu đề: Computer-Aided Kinematic Design of a Torsional Ratcheting Actuator
[6] Firas N. Sammoura, “Novel Rotary Inchworm Motor”, robotics.eecs.berkeley.edu/~pister/245/project/ Sammoura.pdf (2004) Sách, tạp chí
Tiêu đề: Novel Rotary Inchworm Motor
[7] Shannon Zelinski, “Design of Vertical-Lateral Thermal Actuators for MEMS ”, University of California, Berkeley December 6, 2001 Sách, tạp chí
Tiêu đề: Design of Vertical-Lateral Thermal Actuators for MEMS
[8] Mei -Jiau Huang, Po-Kuei Choua, Ming-Chyuan Lin, “Thermal and thermal stress analysis of a thin-film thermoelectric cooler under the influence of the Thomson effect”, Sensors and Actuators, A 126 (2006), pp 122-128 Sách, tạp chí
Tiêu đề: Thermal and thermal stress analysis of a thin-film thermoelectric cooler under the influence of the Thomson effect
Tác giả: Mei -Jiau Huang, Po-Kuei Choua, Ming-Chyuan Lin, “Thermal and thermal stress analysis of a thin-film thermoelectric cooler under the influence of the Thomson effect”, Sensors and Actuators, A 126
Năm: 2006
[9] Phuc Hong Pham, Dzung Viet Dao, Satoshi Amaya, Ryoji Kitada and Susumu Sugiyama, “Novel Micro Transportation Systems Based on Ratchet Mechanism and Electrostatic Actuators”, Transducers2007 - IEEE, Lyon, France (10 – 14th June 2007), Vol. 1, pp 451-454 Sách, tạp chí
Tiêu đề: Novel Micro Transportation Systems Based on Ratchet Mechanism and Electrostatic Actuators
[10] Phuc Hong Pham, Dzung Viet Dao, Satoshi Amaya, Ryoji Kitada and Susumu Sugiyama, “Straight Movement of Micro Containers Based on Motions of Electrostatic Comb-Drive Actuators”, COE Symposium, Ritsumeikan University, Shiga, Japan (12, 13th October 2006) Sách, tạp chí
Tiêu đề: Straight Movement of Micro Containers Based on Motions of Electrostatic Comb-Drive Actuators
[11] Phuc Hong Pham, D. V. Dao, S. Amaya, R. Kitada and S. Sugiyama, “A Si Micro Conveyer System with Straight Displacement Based on Reciprocating Motions of Ratchet Mechanism and Electrostatic Comb- Drive Actuators”, 2006 International Symposium on Flexible Automation - ISFA2006, Osaka, Japan (10-12th July 2006), pp 397-400 Sách, tạp chí
Tiêu đề: A Si Micro Conveyer System with Straight Displacement Based on Reciprocating Motions of Ratchet Mechanism and Electrostatic Comb-Drive Actuators
[12] Thien Dinh Xuan, Van Thanh Dau, Susumu Sugiyama, Phuc Hong Pham, “Fluidic device with pumping and sensing functions for precise flow control”, Sensors and Actuators B (SCI), Vol. 150, Issue 2 (2010), pp 819-824 Sách, tạp chí
Tiêu đề: Fluidic device with pumping and sensing functions for precise flow control
Tác giả: Thien Dinh Xuan, Van Thanh Dau, Susumu Sugiyama, Phuc Hong Pham, “Fluidic device with pumping and sensing functions for precise flow control”, Sensors and Actuators B (SCI), Vol. 150, Issue 2
Năm: 2010
[15] E Sacks and S M Barnes, “Computer-Aided Kinematic Design of a Torsional Ratcheting Actuator”, Proc. of the Fourth International Conference on Modeling and Simulation of Microsystems, Hilton Head, SC, (2001) Sách, tạp chí
Tiêu đề: Computer-Aided Kinematic Design of a Torsional Ratcheting Actuator
[16] Pham Hong Phuc, Dang Bao Lam and Nguyen Tuan Khoa, “Micro linear motor based on electrostatic comb-drive actuators”, Tạp chí Khoa học và Công nghệ, Tập 48 – Số 2A, 2010 Sách, tạp chí
Tiêu đề: Micro linear motor based on electrostatic comb-drive actuators
[17] Ang Beng Seng et al, “Design and Analysis of Thermal Microactuator”, European Journal of Scientific Research, Vol.35, No.2 (2009), pp.281- 292 Sách, tạp chí
Tiêu đề: Design and Analysis of Thermal Microactuator
Tác giả: Ang Beng Seng et al, “Design and Analysis of Thermal Microactuator”, European Journal of Scientific Research, Vol.35, No.2
Năm: 2009
[19] S.Timoshenko, “Strength of materials”, Second edition-1976 Macmilan & Company, Ltd., St. Martin’s Street, London, W.C.2 Sách, tạp chí
Tiêu đề: Strength of materials
[20] Stephen D. Senturia, “Microsystem Design”, Kluwer Academic publishers, 2002 Sách, tạp chí
Tiêu đề: Microsystem Design”, "Kluwer Academic publishers
[21] Gregory T.A. Kovacs, “Micromachined Transducers Sourcebook”, McGraw-Hill, 1998 Sách, tạp chí
Tiêu đề: Micromachined Transducers Sourcebook”, "McGraw-Hill
[22] S Fatikow and U Rembold, “Microsystem Technology and Microrobotics”, Springer-Verlag Berlin Heidelberg, 1997 Sách, tạp chí
Tiêu đề: Microsystem Technology and Microrobotics”, "Springer-Verlag Berlin Heidelberg
[23] R Yeh, S Hollar and Kristofer S J Pister, “Single Mask, Large Force, and Large Displacement Electrostatic Linear Inchworm Motors”, J Sách, tạp chí
Tiêu đề: Single Mask, Large Force, and Large Displacement Electrostatic Linear Inchworm Motors”

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