SCOPE
EQUIPMENT AND SUPPLIES
2.3 Parts and Consumables List (Supplier Information)
SAFETY
OPERATING PROCEDURES
NOTE: This tool runs G-Line wavelength.
4.2 Turn on Lights – located at the top front in the center of the tool on the top control panel. 4.3 Open all Doors (refer to step 4.2)
4.4 Check in the tool for plates and pins and chucks, IPH is close to front.
4.6 Press peddle on the floor with your foot to open Bottom and Top doors
4.7 The Left Green Square Button when pushed opens the Upper Top Left Door.
4.8 The Right Green Square Button when pushed opens the Top Right Door
4.9 The Center top door opens manually – lift up
To manually open the Bottom Right Door, first lift the top door, then press the release button located to the left inside and push the door downward To close the door, simply lift it until the window locks securely in place.
4.11 The Left Red Square Button closes all of the doors.
4.12 Do Daily checks at the beginning of the shift –
4.13 Auto Cal (refer to step _) this is done first thing in the morning
4.14 Best Focus (refer to step ) this is done when needed
4.15 Reticle Check Best Position (refer to step _) this is done when needed
4.16 Get Cassettes Ready (at touch screen)
4.17 Load Plate in Cassette with notch on panel to the front right hand side – top - standing in front of the cassette with metal rails facing you.
4.19 Place cassette on wheel track – sender.
4.21 Place cassette so that the metal bar goes in notch in cassette.
4.22 To Check Reticles and Barcodes NOT DONE VERY OFTEN skip to 4.37
4.23 On touch screen from the Main menu
4.25 NOTE: DO NOT PRESS VERIFY RETICLES unless you have a long time to wait. 4.26 Press Verify
4.30 To See What Is On The Reticle Wheel
4.31 On the computer on the sheltool-/bin/ash screen
4.35 On the touch screen go back to Main
4.39 If more than one Reticle is on the wheel press Utilities and then Auto Unload
4.40 If only one Reticle is on the wheel press Unload Wheel
4.41.6 Enter # Reticle box (example 19 is the PTR reticle)
4.41.8 Type # of slot on wheel to load onto (example 3 is for the PTR reticle)
4.41.9 Type Name of Reticle (example: PTR)
4.42 Continue Getting Cassettes Ready To Run (at touch screen) -
NOTE: Turn screen on by Touching the Corner of the Display Screen.
4.42.1 Press Stop – if it hasn’t been pressed.
4.42.4 Click on slots where no plates are present to run on the load side
4.42.7 Place empty cassette on receiver side
4.42.8 Press Done – Verify screen for correct count
4.43 Load Job / Select Program to run (at touch screen)
4.43.1 Touch lower right corner to wake up monitor.
4.43.11 Open Doors – check pins, for panels, forks facing inward (refer to steps 4.2_)
4.43.12 Close Doors (refer to step 4.2_)
4.43.14 TEMP problem – do = No Initial, Quit, Run Job again
4.43.15 At the Handler screen - Verify slots that have panels loaded to what is on the screen
4.43.17 Yes – even if job has not been selected
When aligning, closely monitor the alignment marks displayed on the chamber's screen If a plate fails to run for any reason, it will be rejected into the receiver cassette, and a red line will indicate which panel did not expose on the Handler screen.
4.43.19 When All plates have been exposed and in the receiver cassette press OK
4.43.23 Develop the panels (refer to Develop Spec # )
4.44 Load / Remove Reticle Manually in Reticle Box
4.44.1 At the touch screen Press Main
4.44.7 Press Done NOTE; Once reticle loader moves out of the way green light flashes
4.44.8 Push Black Button Down by # wanted to remove or Add.
4.44.9 Remove or Add Reticle by pulling out the reticle stack or pushing the reticle stack in.
4.44.10 Want reticle stack to be lit green or red – do the following if it is not:
NOTE: In Reticle Directory you can Verify, Unload
In Utilities you can get a list of reticles loaded
4.45.1 Double left Click on Camera icon at the bottom of the screen
4.45.4 Move the arrow to the window with the data and click on the screen
4.45.5 Click on Print to print the data on the screen.
4.45.7 Press Return – to get 0 prompt
4.46 Shut down for the Night
4.46.1 Turn Lights Off on the top control panel
4.46.2 Turn Off the monitor on the computer
4.47 Fix Loose Reticle on Wheel
4.47.1 On the touch screen go to Main Menu
4.47.10 Hold Reticle in position – push Reticle against the wheel VERY CARFULLY (can break Pelical membrane)
4.47.11 Touch Continue - the orange box on screen while holding the Reticle in place
4.47.12 Once Vacuum is set the screen will display
4.47.13 Unload Reticle and Reload (refer to steps 4.5 and 4.6)
LOG SHEETS + SEPARATE DOCUMENTS
5.1.1 At the computer - Log In
5.1.3 Enter Uniformity, DAC, Auto Focus (don’t enter negative sign)
5.1.4 Go to Summary when done
5.1.6 Click on plots and verify in spec.
ROUTINE MAINTANENCE
6.1.1 Check the temperature of the Chamber (temp should be 21 – upper temp actual) This is located on the top front of the tool.
6.2 Clean Tool - Weekly Checks (Done when Needed – not often can create problems)
6.2.1 At the touch screen from the Main Menu press Stage Position
6.2.2 Press Hand Load to move stage front for easy access.
6.2.3 (?get to XY stage Move Options)
6.2.4 Wipe the Banking Pins (push the brass bearings toward the outer edge) on the Plate Stage use Acetone and Q-Tip.
6.2.5 At the computer type in no hold_all
To maintain cleanliness and ensure optimal performance, use a soft wipe and isopropyl alcohol (IPA) to clean the temperature plate and the vacuum pucks on paddles It is important to avoid cleaning the pucks on handlers; if these pucks become dirty, they should only be cleaned with deionized (DI) water.
6.2.7 Using a soft wipe and IPA wipe down the following: , Granite, All flat surfaces (be careful not to touch the Mirror (white strip).
6.2.8 In back of tool remove doors
6.2.9 Wipe down using soft wipe and IPA _
6.3 Verify What Reticles are on the wheel
6.3.1 On the computer on the sheltool-/bin/csh screen
6.4 Put the Calibration (PTR) Reticle on the Wheel
6.5 Run Auto Cal (done at touch screen) Do every morning
6.5.1 Check to insure PTR Reticle is on the wheel (refer to step _6.4 )
6.5.6 Wait until Done, approx 2-3 minutes – Baseline Spec is 0.1
6.5.7 Press Quit (will be displayed)
6.5.8 Press Back to get back to the Main menu
6.6 Run Best Focus (Done on Monday morning SPC)
NOTE: NEVER do #5 – Bootstrap Calibration
6.6.1 At the computer type unld_chuck on the sheltool-/bin/csh (Scroll Script Folder)
6.6.3 Move the arrow on the screen to the calibration screen (RMI)
NOTE: May have to type Q to go back to the Setup and Calibration Scenarios (Single Camera) screen
6.6.4 On the computer type #6 – Camera Fine Tuning
6.6.5 Type #3 – Find Right Camera Best Focus
6.6.6 Type r – Return to Previous Menu or Collect the Data and Run Analysis
6.6.7 Wait – approx 3 minutes – will display Script Complete, hit (cr) to continue
6.6.8 Press the Return key on the keyboard
6.6.9 Record – New Best Z Camera DAC setting and New Best Center Auto Focus Pixel settings in the log book
6.6.10 Press the Return key – to default to N for Add Focus Plane Pixels offset
6.6.11 Press the Y key – to write the changes to the data base
6.6.13 Wait – approx 15 seconds - screen will change when done.
6.6.17 Left click on Print at the top left of the screen – wait for printer to print approx 1 min.
6.6.18 Move arrow to the top of the blue background at the top of the screen by Sunplot
6.6.21 Left click on the left corner and close bin/csh window
6.6.22 Punch holes in the copy and place copy in the Book
6.7 Reticle Chuck Best Position (Done when needed not done much anymore)
6.7.1 Go to sheltool-/bin/csh screen – place arrow on window
6.7.4 Open RMI window on the computer if needed otherwise place arrow on the window
Note: Q will Back Up the Screen to Setup and Calibration Sceneries (Single Camera)
6.7.5 Type #3 – Fine Camera Set-Up Wheel
6.7.6 Type #6 – Find and Adjust Right Camera Reticle Chuck Best Position
6.7.7 Type r – Collect the Data and Run Analysis
6.7.8 Wait Approx 5 minutes – screen will display Script complete when done.
6.7.10 Y – Update the Optical Axis Position
6.7.12 Y – Correct the Chuck Theta Error
6.7.14 Y- Correct the Chuck Mag and Trap Errors
6.7.16 Double left Click on Camera icon at the bottom of the screen (ONLY if a print out wanted)
6.7.19 Move the arrow to the window with the data and click on the screen
6.7.20 Click on Print to print the data on the screen.
6.7.21 Wait approx 1 minute for printing to start.
6.7.22 Write the date on the print out.
6.7.24 Press Return – to get 0 prompt
6.8 Uniformity (Done Monday morning SPC)
6.8.1 On the computer move the arrow to the sheltool-/bin/csh screen.
6.8.2 Move the arrow to the RMI screen (Calibration Screen)
6.8.4 Type Q – Setup and Calibration Scenarios (Single Camera Screen)
6.8.5 Type #2 Illuminator Set-Up 6.8.5.1NOTE: For new Lamp do #3 Peak 6.8.6 Type #4 Measure Right Camera Illuminator Uniformity
6.8.7 Type r – Collect the Data and Run the Analysis
6.8.8 Wait approx 15 minutes – Script complete will be displayed on screen when done.
6.8.10 Record Uniformity reading in log book
6.8.12 Click on the Snapshot (Camera icon) to open
6.8.15 Move the arrow on the Calibration screen and left click mouse button
6.8.16 Click on Print – wait approx 30 sec
6.8.17 Close snapshot by clicking on the left corner
6.8.18 Write the date on the print out from the printer.
6.8.19 Open bin/csh window located at the bottom of the screen (if bin/csh is not at the bottom of the screen refer to step 9.0
6.8.20 Place arrow on this screen
6.8.25 Press Control D after the plot shows up on the screen
6.8.26 Type y – Do you want a hard copy? (if a print out is needed otherwise press return)
6.8.28 Write the date on the print out of the Uniformity graph.
6.8.29 Move the arrow to bin/csh window to close
6.8.30 Left Click at the left top corner to close the window
6.8.31 Place the arrow on the sheltool….calibration screen
6.8.33 Place arrow on the sheltool/bin/csh screen
6.8.37 Unload Reticles back to boxes:
6.8.38 At the touch screen press Main
6.8.42 Record all of the data in the log book in the computer (located by the 8800 coater) (Refer to step 5.1)
6.9 Banking – Offsets (Not done anymore – per Jesmin data not needed 2012) SKIP TO 6.10
6.9.2 Load 10 panels in the send cassette (panels are numbered – located on rack shelving)
6.9.3 Set up 10 panels to be run on Azores
6.9.7 Write down X, Y and Rotation offset numbers (can write down all 6 numbers)
6.9.8 When done switch panel carts and run job PASS-THRU this will put the panels back in the cassette correctly.
6.9.9 Put the cassette back in its holding station.
6.9.10 Enter data in the computer by going to Operation, Photo, Gen ll SPC, Azores SPC, IPH + Banking SPC
6.9.11 Enter today’s date the first number is X the second number is Y and the third number is Rotation.
6.10 Precision + Stitching (Done Monday morning SPC)
6.10.1 Remove Sender Cassette from Stepper
6.10.2 Place 1 new coated plate in the bottom slot (flat corner to the right of you)
6.10.3 Place cassette on the Sender – make sure cassette is seated properly
6.10.4 At the Touch Screen – touch Main
6.10.7 Press screen and type in PSO-L1 (manual load – box 19, wheel position 3)
6.10.11 Press #1 – one plate to be run only
6.10.15 Program Handler – at wafer handling screen
6.10.18 Select locations of the plates to run on the screen
6.10.21 Press Done – wait for reticles to load on the wheel – if not completed
6.10.24 When plate is completed an alarm will beep
6.10.27 Unload the plate from the receiver cassette – be careful to keep right side up.
6.10.28 Develop the 1 plate on the EVG Developer – job to run is DAS Standard Process
6.10.29 Same plate to be run with the overlay job.
6.11 Overlay (Done Monday morning SPC)
6.11.1 Load the same plate that was used for Precision in the sender cassette – slot 1 on the Azores send cassette making sure the photoresist side is up.
6.11.2 At the touch screen Press Back to Main
6.11.5 Type in PSO-L2 (reticle will still be on the wheel from box 19)
6.11.12 Press Edit Cassette at wafer monitor
6.11.14 Touch screen indicating where plate is loaded to run (bottom #1 slot)
6.11.18 On the touch screen press Run Job
6.11.19 At the Cassette monitor Press Operate
6.11.20 Press Yes NOTE: Plate will align to the previous crosses – watch the monitor in the tool.
6.11.21 When complete an alarm will sound Press Ok
6.11.23 Unload the Plate from the receiver cassette
Type in unld_noret Press Return
6.11.25 Develop the plate – job to run is Standard Process 6.11.26 Inspection – Overlay the Right Die and Precision and Stitching the Left Die’s
6.11.27 Place the plate on the Olympus Microscope – the flat corner will be located at the lower left – butt edges up against the pins on the stage.
6.11.28 Inspection: Place the plate on the Olympus Microscope – the flat corner will be located at the lower left – butt edges up against the pins on the stage.
6.11.29 For Precision and Stitching the Left Die’s will be recorded (only die 1, 3, 5 are read)
The stitching will be visible on the left side of the die, aligning with the Precision area, while the horizontal stitching will be located on the right side of the die.
6.11.30 Move to the left die (1) at the top of the plate
6.11.31 Move objective to the middle – top of the die and look for R01, C64 Refer to 7.1, 7.2, 7.3 photo of location to be recorded.
6.11.32 Create a folder for photos to be put into.
6.11.37 Create New Folder with a title of the date (example: 012117 PSO CD day/month/year Prescision/Stitching/Overlay)
6.11.38 Take photo and save 2 times name PV1,SV1 for each die (do for die 2 and 3 as well example PV2 etc, PV3 etc)
6.11.39 Taking the same photo Click on Edit and Rotate Right then save name PH1(do for die 2 and 3 as well example PH2 etc, PH3 etc)
REMEMBER: Stitching Horizontal is the Left Die move to the right upper corner of the die and then go down to R01, C64
Capture an image of the Stitching Horizontal lines, then select Edit and rotate the photo to the right, saving it as SH1 (refer to photo 7.2 for guidance) Repeat this process for the next two locations, editing and rotating each image to the right, and label them as SH2 for the second location and SH3 for the third location.
NOTE: Refer to photo 7.2 for location
6.11.44 Repeat same locations for each die 1, 3 and 5 repeat steps 6.9.45 to this step and save photos for Overlay using the Right Die
To document the process, take an initial photo and save it as OV1 Next, edit the same photo by rotating it to the right and save this version as OH1 for die 1 Repeat this procedure for dies 2 and 3, naming the photos accordingly as OV2, OH2, OV3, and OH3.
NOTE: There will be a total of 6 photos OV1 through OV3, OH1 through OH3 (Overlay Vertical and Horizontal for Die 1, 3 and 5).
6.11.47 When all data is collected close the window
6.11.48 Remove the plate from the microscope
6.11.49 Place the plate in the cassette on the rack marked to be Asher
6.11.50 Unload all of the reticles 6.11.51 At the touch screen Press Manual Ops (if not displayed press Back or Main)
In step 6.11.55, press the Auto Unload button to ensure that all reticles are automatically removed and placed back into their designated boxes After all reticles have been successfully unloaded, proceed to step 6.11 to complete the data collection process.
6.12 Data from Precision, Stitching and Overlay Saved
6.12.1 On the computer by the microscope:
6.12.3 Open operations on ‘Operation Server 01 (fdcsrvfs01)’ (Q:)
6.12.7 Open today’s dated folder (example: 012117 PSO CD) - view
6.12.8 Review all Pictures open the screen full
6.12.9 Make sure all horizontal photos have been rotate the 90 degrees, Close file
6.12.12 Open Today’s Date PSO CD folder
6.12.13 Click on OK for CD Summary
6.12.14 Click on and open the first photo
6.12.15 Move the screen so you see the image (photo)
6.12.16 Click and hold on the screen and drag the invisible box over the lines (click at upper left corner and drag to bottom right corner of lines)
NOTE: Do not put rounded edges in the box
IMPORTANT : Make sure there are measurement readings at the bottom of the log if not repeat invisible box over the lines may need to change size of box.
6.12.18 Repeats for the next photo for a total of 18 photo’s
6.12.19 Click on Exit To Windows
6.12.22 Open folder at the bottom of the photo’s
6.12.23 Open PSO Template 3 data points
6.12.25 Open Excel CD Summary with today’s date
6.12.26 Click on Hold and cover all of the data points (to be copied) A2
6.12.29 Click on PSO Template at bottom at the screen
6.12.30 Click on Data at the bottom of the screen
6.12.31 Click once on Paste Here (B2 click only on this square)
6.12.37 Click on Summary Excel CD and change name to Summary_2
6.12.40 Click on Option & Select (enable this content)
6.12.43 Click on PSO SPC Template 3
6.12.50 Repeat 6.12.47 for Precision, Stitching and Overlay
6.12.51 When done click on Summary – this will update all data click here to update workbook
6.12.52 Right click on Directory in upper left corner in the upper left corner of the computer screen
6.12.53 Click on Exit Excel located at the bottom of the window right side
6.12.54 Click on Yes to All
6.12.56 Check plots Click on PSO SPC Template 3 look at each graph
6.12.56.1 NOTE: Stitching and Overlay is 1/2um spec and Precision is 1/4um spec
6.12.56.2 NOTE: For Overlay adjustment tell Engineer
6.15 To bring Stage out from under the Exposure Lamp
6.16 Back UP when prompted to do so.
6.21.1 At the computer open PCAD screen by clicking on the folder.
6.21.4 Choose Job to Run (example RAS2-ALL) and (ALL-TEST)
6.21.6 Make changes needed to job……ADD INFO here
6.21.11 OK – to Compile and Exported Job Name
6.22 To Fix Plate Size in job ADD INFO here
6.23 To Manually Unload Panels from tool – Load side
6.23.1 Unload the Panel using the front screen in Reticle Directory
6.23.2 Open Doors (refer to step )
6.23.4 Press the white area to continue on the touch screen
6.23.5 If plate loads wrong the second time touch last plate on touch screen
6.23.6 Once screen indicates processing complete
6.23.7 Open all doors check all plates are off.
6.23.9 Press Stop on handler screen
6.23.15 Catch by hand the plate coming out at the sender
6.23.17 At the touch screen press Manual Ops
6.24 Lamp Change – Removing old lamp
6.24.1 Keep Power Supply and Cooling controller ON for now
6.24.2 Press Lamp OFF (located in back left of machine in the Power supply panel) wait 20 minutes for Lamp to cool
6.24.3 Feel Exhaust Duck in back of tool that it is cool.
6.24.4 When Lamp is cool Flip Breaker OFF for Power (located in indented box in the power supply panel)
6.24.6 Flip Breaker OFF on Power – located at the bottom of the panel labeled Right Illuminator
6.24.7 Take off back panel door located on the left of tool (lamp housing)
6.24.8 Unscrew back panel – turn panel door upside down and place edge on floor.
6.24.9 Remove inside panel by unscrewing 6 screws by hand
6.24.10 Place door panel inside on the bottom of the camber so that no screws or anything falls down
6.24.11 Using a wrench remove the ground cable screw (lead screw) on the lamp.
To safely remove the lamp from the housing, grip it firmly to avoid contact with the sides, then pull it straight downward while tilting it slightly to extract it It is crucial to never touch the glass part of the lamp during this process.
6.25 Lamp Change – Installing new lamp
6.25.1 Remove the lamp from box – handle carefully – do not touch glass
6.25.2 Place the new lamp in the center of the ellipse
6.25.3 Screw Lamp into the top of the lamp motion assembly – hand tighten.
6.25.4 Attach ground cable lead screw and tighten with fingers then tighten slightly with wrench.
6.25.5 Remove Back cover from inside that is lying on the bottom.
To ensure a clear reflection, shine a flashlight onto the mirror to inspect for any dirt or particles If the surface appears dirty, gently clean it using a soft cloth dampened with a 50% isopropyl alcohol solution, wiping in a single, smooth motion.
6.25.7 Recheck using the Flashlight for dirt particles.
6.25.8 Put back (silver cover) On and tighten screw by hand only
NOTE: Behind the door is located a shut off safety switch which will shut off the lamp.
6.25.9 Place Back (Black) cover on Lamp housing – tighten screws by hand
6.25.11 Flip ON Right Illuminator Power
6.25.12 Flip Breaker - Cooling Controller ON
6.25.13 Flip Lamp Power Breaker Run (black) up – ON (located in indented box)
6.25.15 Zero out the Lamp Hours
6.25.17 Continue with step 6.25 (peak lamp)
6.26.1 on computer type unld_noret – this will unload any reticle.
6.26.2 At touch screen – Main Menu
6.26.5 Wait for message to come up – Adjust Illuminator to max -
NOTE: Can be done at the computer by typing
Type #2 - Illuminator Set-UpType #3 - Peak Right Camera Illuminator LampType r – to run
6.26.6 Using the lamp meter to peak do the following on meter:
6.26.12 Flip toggle switch to X select
6.26.13 Set meter to 0 using the control knob (offset knob)
6.26.16 Located in the cabinet at the top behind the top panel in the center – Loosen the locking knob
To peak the lamp, utilize the appropriate screws while noting that screws X and Y are ineffective with the tool Instead, adjust the lamp housing unit, ensuring to monitor the meter closely for optimal results.
6.26.19 Open the door for only 45 seconds then shut the door for 15 seconds and then adjust again.
6.26.20 Repeat opening and closing door and adjusting until the lamp is peaked.
6.26.21 Do Z peak with the spoke knob (only after X and Y are in)
6.26.22 Do not decrease 5% as it states on the meter instructions – leave lamp peaked
6.26.23 Place doors back on by removing the bottom door and put top door on then replace the bottom door on.
6.26.24 Flip the meter OFF – (this takes 2 DD batteries)
6.26.25 On the touch screen – touch QUIT
6.26.26 Run the Calibrations (refer to step 6.0).
6.27.1.1 NOTE: Remove all plates from the tool before reboot
6.27.2 On the touch screen press Main
6.28 After Reboot Do the following:
6.28.1 If you Stage Origin do Course, Center, Theta
6.28.2 Load the PTR Reticle on the wheel 3
6.28.3 On the computer open RMI Calibration Folder
6.28.4 Place the arrow in the box
6.28.5 Click on #1 – Gross Camera Set-Up
6.28.6 Click on #4 – Find and set Right Camera Course, Center and Theta
6.28.7 R – Collect the data and Run the Alalysis (Takes approximately 3 minutes)
6.28.11 Run Calibration6.28.11.1 NOTE: If the Theta is not working right Type S (Saving data Base to host)
6.29 Complete Power Down and Power Up-Restart of the Azores
6.29.1.1 NOTE: Remove all plates from the wheel before reboot
6.29.2.1 On the touch screen press “Main” or “Back” to display Main Menu
6.29.2.7 Wait for all reticles to be unloaded from wheel and into appropriate boxes
6.29.2.8.1 Keep Power Supply and Cooling controller ON for now
To ensure safety and proper maintenance, press the "LAMP OFF" button located at the back left of the Lamp Power Supply Tower and wait for 20 minutes to allow the lamp to cool down After this period, check the exhaust duct at the back of the tool to confirm that it is cool to the touch.
6.29.2.8.4 When Lamp exhaust duck is cool Flip Breaker labeled “POWER” to OFF on the MECURY LAMP
POWER SUPPLY box (located in an indented area)6.29.2.8.5 Flip COOLING CONTOLLER breaker to “OFF”
6.29.2.11 Flip off X breaker (Power supplies)
6.29.2.12 Press Stop button on ECU
6.29.2.13 Press Stop button on Main Power Control Box
6.29.2.14 Move main power Lever to OFF position 6.30 Power Up or Restart of the Azores
6.30.1 Move main power Lever to ON position
6.30.2 Press Start button on Main Power Control Box
6.30.3 Press ON button on ECU
6.30.3.1 Wait 2X the time power was off for ECU to stabilize the temperature inside the Azores
6.30.3.1.1 Minimum is 2 hours and maximum is 120 hours
6.30.4 Flip on X (Power Supplies) and wait 5 minutes
6.30.5 Flip on Z and verify Laser power is on at laser HEAD
6.30.6 Turn on UV Lamp 6.30.6.1 Flip COOLING CONTROLLER breaker to “ON” position
6.30.6.2 Flip MECURY LAMP POWER breaker to “ON” (located in indented box)
6.30.6.3 Press LAMP “ON” button, if needed press “RESET” button then press LAMP “ON”
6.30.6.4 Wait 20 minutes for Laser and UV Lamp to thermally stabilize
6.30.6.4.1 Verify Laser ON green LED is lit and Stable LED is lit on Laser HEAD
6.30.7.1 Wait until System Reboots and Touch Screen Displays “Reboot
6.30.8 Complete all items in sections 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.8, 6.10, 6.11 and 6.12 to calibrate and verify equipment operation.
ILLUSTRATIONS AND PHOTOS
7.1 Precision reading locations (LEFT DIE), Stitching Vertical top set of lines
7.2 Stitching location - Horizontal (LEFT DIE) located on the right side of the die down ẵ
7.3 Overlay reading locations (RIGHT DIE) – located at the top in the middle.
ADDITIONAL REFERENCE SPECIFICATIONS/MATERIAL
8.1.1 Exposure Programs List (what they are used for)
3 ASU-LAYER1 (Test pattern 4 arrays – for show – display on screen only)
4 ASU-LAYER2 (Test pattern 4 arrays 2 nd layer – for show – display on screen only)
5 CYCLE (Azores program – not used)
6 CYCLE1 (Azores program – not used)
7 EXP-ALL (exposes all of the plate to remove all resist in the developer)
8 FDC-PROMO (Flexible Display Center – resist everywhere except letters)
9 FDC-PROMO-CLEAR (Flexible Display Center – resist only where letters are)
16 PR-THICK-DOSE (Different Dose – resist process set-up)
17 PR-THICKNESS (Same Dose everywhere – Linewidth /Resist Thk /Uniformity)
27 RAS2-ALL (2 nd level for Alignment and Stitching - not used now)
29 RAS2A (Alignment + Stitching) not used now
36 REVERSE (Reverses the plates in the cassette ready for develop – corner in right position)
43 EDGE-REMOVAL (Exposes resist around the edge of the panel)
44 DIST-BASELINE (Distortion test for alignment keys)
45 DIST-L1-01 (Distortion test for alignment keys)
46 DIST-L2-0 (Distortion test for alignment keys)47.
TROUBLESHOOTING/ERRORS
9.1 bin/csh isn’t at the bottom of the screen:
9.1.1 Right click and hold on the blue background (off of windows opened)
9.1.2 Highlight and release on UNIX
9.1.3 Place the arrow on the Sheltool screen
9.1.6 Type PWD – this should be in cj data
9.2 If is not on the screen (sheltool-/bin/csh) (Scroll Script Folder)
9.2.1 Right click on the Blue Background on the screen
9.2.2 Click on MRS Panel/Printer Operation Tools
NOTE: 2 grippers on Reticle robot inside (middle) and 2 grippers on Reticle Box all should be closed.
9.3.1 On the computer type grip
9.3.3 Type ungrip (Make sure no Reticle in on)
9.3.5 Type rl_rob_stat (Reticle Robot Status)
9.3.7 Check Wrist, Door, Reticle, Gripper, and Banker
NOTE: Stage will float ADD INFO HERE HOW TO FIX
9.5.1 On the computer Right click on Blue part of the Screen
9.5.5 Type ls (list all error files)
9.5.6 Type dcbn he_log.rial …………
9.5.9 Press the letter U to scroll up the screen,
Press the Space Bar to skip page to page,
Or Press the Return key to go down error by error
9.6 Error – No Carrier – Transceiver Cable Problem? Appears on screen
(this error comes on when the log gets full)
NOTE: This whole procedure must be completed in 6 seconds or redo all steps again.
9.6.1 Right Click on Blue Background on the screen
9.6.4 Close out All windows on the Screen
9.6.6 Open shel/bin/csh program
9.7 To Center the Cross in Monitor and Focus
NOTE: Done during PM every 6 months or if Auto Calib Fails
9.7.3 Type #1 – Course Ras Baseliine + Focus
9.8 No Camera Box on the Screen
9.8.1 Right click in the Blue background on the screen
9.8.3 Drag to Snap Shot (open)
9.9 If RMI is not on the screen
9.9.1 Right click on the blue background on the screen
9.9.2 Left click and hold on MRS Panel Printer RMI
9.9.3 Highlight and release mouse button on CALIBRATION
9.10 If RMI is locked up
9.10.1 Close the program by clicking on the left corner of the folder
9.11 If you have to remove the panel from the Azores when started – need to clear the job.
9.11.4 On the Sun computer type i Press Return
9.11.6 The list will come up look for je_exec # (of the error # 27, 28 etc) Type td 0x (the error # found from 9.11.6) example: td 0x28
9.11.7 Press Enter 9.11.8 Retype i and check for je_exec (error # again)
9.12.1 Right Click Background9.12.2 Highlight Application Engineering tool9.12.2 Highlight Error Tool
9.13.1 Close out the screen and reopen or control C, return, return
9.14 If bin/csh not working reopen
9.14.1 Close out the screen 9.14.2 Type cd $cdat 9.14.3 Press Return
9.15 If the Sun computer locks up – reboot
9.15.1 In the cabinet behind the Sun Computer in large cabinet press the reset button (little red button) on the top panel.
9.16 If reticle retrieving arm gets stuck in the reticle box
9.16.1 At the Sun Computer type in ungrip 9.16.2 Type rl_rob_stat
9.16.3 Type rl_y_nohold 9.16.4 Manually pull arm out of the box – no reticle should be attached be very careful.
9.16.7 Type rl_move_door 0 9.16.8 return
9.16.9 type rl_powerup9.16.10 Type rl_move_x 29.16.11 type rl_originate_wrist (if the wrist is not horizontal or vertical – off)9.16.12 If still not working call Azores service
9.17 If job quits during run
9.17.1 Press Abort on the touch screen 9.17.2 Quit on the touch screen
To ensure optimal performance, auto unload reticles should be utilized, and it's important to verify if any jobs are currently running on the Sun system By executing the cm_stat command on the Sun type, you can check the status of the wheel, chuck, and camera, ensuring that the vacuum is off and that both the wheel and blade are in the correct positions.
To ensure proper calibration, start by showing the type rets, followed by confirming that the return has no vacuum Next, calibrate the wheel type by setting rw_originate to 0 and verify that the wheel moves, ensuring the display reads 0=0x0 upon completion Finally, calibrate the Z type by adjusting rw_originate_z to 0.
9.17.11 Return (watch the wheel goes in and out very slight movement) (should have 0=0x0 when done)
9.17.12 Calibrate the Camera type cm_originate 0 9.17.13 Return (moves up and down) (should have 0=0x0 on screen when done NOTE: if a # comes up – not good)
To resolve the issue, set the cm_originate to 0 and repeat the process If the problem persists, perform a hard reboot of the tool by turning off the breakers Ensure that all reticles and panels are powered down before initiating the reboot.
9.18 If job stops running during PSO-L1 JOB
9.18.1 Press Abort 9.18.2 Press Quit 9.18.3 Auto Unload reticles 9.18.4 Type in cm stat (checks the wheel/chuck/camera)
Note: should have the wheel and blade out / check the vacuum on all should be off 9.18.5 Press Return
Note: should show none no vacuum 9.18.7 Press Return
9.18.8 Calibrate the wheel by typing in rw_originate 0 (make sure wheel moves) 9.18.9 Press Return (should have 0=0x0 prompt)
9.18.10 Calibrate the Z - type in rw_originate_z 0 9.18.11 Press Return (watch will go in and out – may be very slight movement) 9.18.13 Calibrate the Camera – type in cm_originate 0
9.18.14 Press Return (moves up and down will have 0=0x0 prompt when corrected if a # comes up it is not correct)
Note: If a # comes up repeat step from 9.18.13 if a # still comes up hard reboot
9.19 If Reticle is not set on wheel – no vacuum (CHECK THIS SEQUENCE BEFORE USING – Sue did this on the phone with service rep may have missed some things)
9.19.4 If no vacuum check the hoses 9.19.5 Type rw_vac 0,0,1
9.19.6 Press reticle on wheel – check vacuum 9.19.7 Type rw_vac 0,0,0
9.19.8 When set type rw_rotate 0,3 9.19.9 Return
9.19.10 Type cm_stat 9.19.11 Type rw_rotate 0,0 9.19.12 Type cm_stat 9.19.13 Type rw_rotate 0,3 9.19.14 Type cm_stat
9.20 Calibrate / Originate the Wheel when reticle does not mount correctly
9.20.1 Type rw_originate_z 0 (originate wheel in/out) 9.20.2 Press Return
9.20.3 Type show_rets 9.20.4 Press Return
9.21 If Send Cassette computer screens is off or needs to be rebooted:
9.21.1 Open the front panel - turn the computer off 9.21.2 Turn the computer on
9.21.3 Type in Engineer on the screen 9.21.4 Type in x
9.22.1 Type ungrip9.22.2 Press Return9.22.3 Type grip9.22.4 Press Return9.22.5 Type ungrip9.22.6 Press Return9.22.7