[...]... 7 MEM Structures and Systems in RF Applications 189 Signal Integrity in RF MEMS Passive Electrical Components: Capacitors and Inductors Quality Factor and Parasitics in Passive Components Surface-Micromachined Variable Capacitors Bulk-Micromachined Variable Capacitors Micromachined Inductors Microelectromechanical Resonators Comb-Drive Resonators Beam Resonators Coupled-Resonator Bandpass Filters Film... Micro; and Stephen Durant and Christopher Eide of Morrison and Foerster Evan Green and Carter Hand of New Focus were kind enough to review portions of the manuscript Thanks go to our editor, Mark Walsh, for his unwavering support Kirt Williams further thanks his former graduate advisor, Professor Richard S Muller, for having such a profound effect on his life for introducing him to MEMS (Courtesy of: Engineering. .. maintenance and monitoring structural health Distributed control of aerodynamic and hydrodynamic systems Military Applications Inertial systems for munitions guidance and personal navigation Distributed unattended sensors for asset tracking, and environmental and security surveillance Weapons safing, arming, and fusing Integrated microoptomechanical components for identify-friend-or-foe systems Head- and... colleagues, friends, and family members This book is no exception I am grateful to Al Pisano for his general support and for recognizing the value of an introductory book on MEMS I would like to thank Greg Kovacs, Kirt Williams, and Denise Salles for reading the manuscript and providing valuable feedback They left an indelible mark of friendship on the pages of the book I am thankful to many others for their... and added an entirely new section on reliability and quality assurance We added several references to each chapter to direct the advanced reader to the source of the material We also expanded the glossary to assist the novice in understanding and relating to a new terminology Many people provided us technical information and materials specifically for the second edition of this book We thank Bardia... thanks to miniature read and write heads And finally, as the patient went to sleep, an array of micromirrors projected a pleasant high-definition television image onto a suspended screen Many of the miniature devices listed in this story, in particular the pressure, acceleration, and yaw-rate microsensors and the micromirror display, already exist as commercial products Ongoing efforts at many companies... component and the system can readily reach a factor of ten and occasionally higher Another example is an emerging automotive application for MEMS initiated by the U.S Congress when it passed the Transportation Recall Enhancement, Accountability and Documentation (TREAD) Act in 2000 requiring warning systems in new vehicles to alert operators when their tires are underinflated (the law was in response to the... companies and laboratories throughout the world promise to deliver, in the not-too-distant future, new and sophisticated miniature components and microsystems It is not surprising, then, that there is widespread belief in the technology’s potential to penetrate in the future far-reaching applications and markets What Are MEMS—or MST? In the United States, the technology is known as microelectromechanical systems. .. microsystems is an evolutionary process; we spent the last 30 years learning how to build micromachined components, and only recently we began learning about their seamless integration into subsystems and ultimately into complete microsystems One notable example is the evolution of crash sensors for airbag safety systems Early sensors were merely mechanical switches They later evolved into micromechanical sensors... sensors Miniature biochemical analytical instruments Cardiac management systems (e.g., pacemakers, catheters) Drug delivery systems (e.g., insulin, analgesics) Neurological disorders (e.g., neurostimulation) Engine and propulsion control Automotive safety, braking, and suspension systems Telecommunication optical fiber components and switches Mass data storage systems RF and wireless electronics Distributed . Nadim. An Introduction to microelectromechanical systems engineering 2nd ed. –(Artech House microelectromechanical library) 1. Microelectromechanical systems I Microelectromechanical Systems (MEMS) Series, turn to the back of this book. An Introduction to Microelectromechanical Systems Engineering Second Edition Nadim