Department of Electronics Page | 1 Semiconductor Devices Laboratory Advanced Program... TCAD Examples Department of Electronics Page | 2 Semiconductor Devices Laboratory Advanced Progr
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Department of Electronics Page | 1
Semiconductor Devices Laboratory (Advanced Program)
Trang 2> The purpose of this lab is to learn how to use Atlas — Silvaco TCAD Tool
> We learn how to use the Atlas command language to define a semiconductor device
> We examine BJT Characteristic
PREPARATION FOR LAB 2
> Install Silvaco Tool
> Read User manual
REFERENCE
1 Atlas User’s Manual
2 TCAD Examples
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Semiconductor Devices Laboratory (Advanced Program)
Trang 3characteristic: Ic = f(Vcr) at Ip =2.10-5A
Instruction:
~ In this experiment, there are some missing regions Define them by using an oxide region
- To calculate the input characteristic In = f(Vpe) at Vcz =5V, a 5V voltage source is applied at the collector Then, solve the voltage at the base from 0V to end point (for example 1V) The
code
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Semiconductor Devices Laboratory (Advanced Program)
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Laboratory 2:
BJT
for this step is shown below:
- Ta calculate the output characteristic Ic = f(Vce) at Ip = 2.10-5A, a current source is applied at the basg Then, solve the voltage at the base from 0V to end point (for example 12V) The code for thig.step 1g shown below: VCO
Say qutỆrJtja†a L.siy,paster
aalira wanllantarHf A wrotanHf 2Ã x7 final=19 1 namasnrallantar
The statement “contact name=base current” is used to switch a current source at the base
Note: in the simulation, the emitter is always connected to the ground (OV)
Check:
Semiconductor Devices Laboratory (Advanced Program)
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Semiconductor Devices Laboratory (Advanced Program)
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Laboratory 2:
BJT
output
Data trêu TPSbjt2.log
> In TonyPlot Window display structure, right click and choose “Display ” Then choose
to display: Contours and Electrodes Capture the result
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Semiconductor Devices Laboratory (Advanced Program)
Trang 7> On Toolbar menu, choose Tools © Cutline Draw a horizontal cutline at 2 micron Show
the concentration allocation with respect to x-coordinate Capture and explain why we have this graph
The graph shows how the concentration of dopant atoms varies across different parts of the Bipolar Junction Transistor (BJT) along the two-micron lines This variation pattern closely resembles the data representing the desired doping profile
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Semiconductor Devices Laboratory (Advanced Program)
Trang 8> Right click, choose to Display Electric Field Capture and explain the graph
The graph confirms theoretical expectations for BJTs We observe a small rise in the
electric field around the 6-micron mark, which coincides with the location of the base
region A significant increase in the electric field then occurs between 9 and 12 microns, corresponding to the emitter region
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Semiconductor Devices Laboratory (Advanced Program)
Trang 9BJT
> Then, choose to Potential Capture and explain the graph
Section 1 from Ib2bjt2.str
(-0.200 , 1.999) to (15.200 , 1.999)
The potential graph is equivalate to the electric field graph
> Then, choose to Total Current Density Capture and explain the graph
Potential (V)
The graph shows the total current density changing across the device On the left side, the current density gradually increases In contrast, the right side shows a steady decrease in current density, followed by a sharper drop until it reaches a specific point in the middle This indicates that the current density is building up at different rates on either side of the device and converging towards a central point
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Semiconductor Devices Laboratory (Advanced Program)
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Trang 10Department of Electronics Page | 10
Semiconductor Devices Laboratory (Advanced Program)
Trang 11- The input characteristic Is = f(Vpe) at Vcz = 1V, 3V, 5V, 7V, 9V, 12V
- The output characteristic: Ic = f(Vcg) at Ip = 1.10-5A, 2.10-5A, 4.10-5A, 8.10-5A, 10-4A
Show all the input characteristics in one graph and all the output characteristics in the other graph Instruction:
- In this experiment, we need to simulate and show the input characteristic at 6 conditions of Vce We show the example for two conditions:
solve veollector=1
save outf=bjtdatal str
master solve veollector=3
save outf=bjtdata2.str master
load inf=bjtdata1.str
master log
outf=bjtdatal log
solve vbase=0.0 vstep=0.05 vfinal=1
name=base load inf=bjtdata2.str master
log outf=bjtdata2.log
solve vbase=0.0 vstep=0.05 vfinal=1 name=base
Use “tonyplot -overlay” to show all the characteristics on a graph
Check:
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Semiconductor Devices Laboratory (Advanced Program)
Trang 12> From the input characteristic, calculate the Veron) at each condition Fill the table 1
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Semiconductor Devices Laboratory (Advanced Program)
Trang 13From the table, comment on the trend of the input characteristic
As V_CE increase VBE(ON) would also increase
> From the output characteristic, calculate the Vcgsa at each condition Fill the table 2
pata Fon one les
From the table, comment on the trend of the output characteristic
As I_B increase VCEsat would also increase
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Semiconductor Devices Laboratory (Advanced Program)
Trang 14characteristic: Ic = f(Vec) at Ip = 2.10-5A
Instruction:
~ In this experiment, there are some missing regions Define them by using an oxide region
~ Remember that the emitter is always connected to the ground (OV) In this case, we need to set the voltage at the base and the collector negative
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Semiconductor Devices Laboratory (Advanced Program)
Trang 15Department of Electronics Page | 15
Semiconductor Devices Laboratory (Advanced Program)
Trang 16BJT
Data from LS pit2.log
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Semiconductor Devices Laboratory (Advanced Program)
Trang 17BJT
> From the output characteristic, calculate the Vecsat at Ip = 2.10-5A
> In TonyPlot Window display structure, right click and choose “Display ” Then choose
to display: Contours and Electrodes Capture the result
> On Toolbar menu, choose Tools © Cutline Draw a horizontal cutline at 2 micron Show
the concentration allocation with respect to x-coordinate Capture and explain why we have this graph
The graph displays the amount of concentration doping on different regions of the BJT where the 2 micron lines pass through It can be compared with the data provided by the requirement
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Semiconductor Devices Laboratory (Advanced Program)
Trang 18matches the desired characteristics
> Right click, choose to Display Electric Field Capture and explain the graph
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Semiconductor Devices Laboratory (Advanced Program)
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Trang 19Then, choose to Total Current Density Capture and explain the graph
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Semiconductor Devices Laboratory (Advanced Program)
Trang 20BJT
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Semiconductor Devices Laboratory (Advanced Program)
Trang 21- Nog= 8,15.1018 em-3 , Npoc = 2,67.1014 cm-3, Nap=5,12.1016 cm-3
- Le=4 um, Lg =9 um, Lc = 12 wm
- We =4 wm, We = 6 um, Wc = 8 wm
~a=2 um
The length of metal contact is 1 um
The spacing of x-axis and y-axis are 0.2um and 0.1m
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Semiconductor Devices Laboratory (Advanced Program)
Trang 22~ Devide the structure into many regions
~ In this experiment, there are some missing regions Define them by using an oxide region
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Semiconductor Devices Laboratory (Advanced Program)
Trang 23ATLA Data from AApit1 log
Department of Electronics Page | 23
Semiconductor Devices Laboratory (Advanced Program)
Trang 24> In TonyPlot Window display structure, right click and choose “Display ” Then choose
to display: Contours and Electrodes Capture the result
~ Data lên KH sĩ
~ G
Microns
> On Toolbar menu, choose Tools © Cutline Draw a horizontal cutline at 2 micron Show
the concentration allocation with respect to x-coordinate Capture and explain why we have this graph
Department of Electronics Page | 24
Semiconductor Devices Laboratory (Advanced Program)
Trang 26> Then, choose to Total Current Density Capture and explain the graph
Section 1 from ex4bjt1 str (0.000 1.995) to (12.000 1.995)
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Note: If you want to display potential, electric field,
after the electrical simulation step